A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 604-612

  Van Spengen, W Merlijn ^a,b   Puers, Roberts ^b   Mertens, Robert ^a,b   De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES; ELECTROSTATIC ACTUATORS; RELIABILITY; STICTION;

ELECTRICAL TEST SET UP; RELIABILITY ASSESSMENT;

MICROELECTROMECHANICAL DEVICES;

EID: 0141718825     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/311     Document Type: Article

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