Wet-etch bulk micromachining of (100) InP substrates

Journal of Micromechanics and Microengineering

Volumn 14, Issue 8, 2004, Pages 1205-1214

  Elias P ^a   Kostic I ^b   Soltys J ^a   Hasenohrl S ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INSTITUTE OF INFORMATICS   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL LATTICES; DOPING (ADDITIVES); ETCHING; INDIUM COMPOUNDS; METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; PLASMAS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

BUFFER LAYERS; CONVEX PATTERNS; PATTERN ORIENTATION; WET ETCHING;

MICROMACHINING;

EID: 4243155147     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/8/013     Document Type: Article

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