InP in HBTs by vertical and lateral wet etching

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1998, Pages 195-198

  Matine, N ^a   Dvorak, M W ^a   Pelouard, J L ^a   Pardo, F ^a   Bolognesi, C R ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CRYSTAL ORIENTATION; ELECTRIC RESISTANCE; ETCHING; HETEROJUNCTION BIPOLAR TRANSISTORS; MASKS; SEMICONDUCTOR DEVICE STRUCTURES; SURFACE PROPERTIES;

LATERAL WET ETCHING; VERTICAL WET ETCHING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032288811     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)