Properties of InGaAs/InP thermoelectric and surface bulk micromachined infrared sensors

Applied Physics Letters

Volumn 69, Issue 20, 1996, Pages 3039-3041

  Dehé, Alfons ^a   Hartnagel, Hans L ^a   Pavlidis, Dimitris ^b   Hong, Kyushik ^b   Kuphal, E ^c  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b University of Michigan   (United States)

^c Technologiezentrum   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008451428     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116832     Document Type: Article

References (11)

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