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Volumn 148, Issue 4, 2001, Pages

Effect of Etch Mask and Etching Solution on InP Micromachining to Form V-Grooves

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Indexed keywords

EID: 0442294832 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1357177 Document Type: Article

Times cited : (2)

References (8)

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