Fabrication of InP-based freestanding microstructures by selective surface micromachining

Journal of Micromechanics and Microengineering

Volumn 6, Issue 2, 1996, Pages 261-265

  Seassal, C ^a   Leclercq, J L ^a   Viktorovitch, P ^a  

^a ECOLE CENTRALE DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; EPITAXIAL GROWTH; ETCHING; MICROMACHINING; OPTOELECTRONIC DEVICES; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING INDIUM PHOSPHIDE; THICK FILMS;

CANTILEVERS; ETCHING ANISOTROPY EFFECTS; ETCHING SELECTIVITY; FREE STANDING MICROSTRUCTURES; OPTICAL APPLICATIONS; SELECTIVE SURFACE MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030156449     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/2/008     Document Type: Article

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