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Volumn 145, Issue 4, 1998, Pages 1273-1276

Ultrasmooth V-grooves in InP by two-step wet chemical etching

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BROMINE COMPOUNDS; ETCHING; MASKS; POTASSIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SURFACE ROUGHNESS; TITANIUM;

ULTRASMOOTH V GROOVES; WET CHEMICAL ETCHING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032048823 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1838450 Document Type: Article

Times cited : (27)

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