Error reduction techniques for measuring long synchrotron mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3447, Issue , 1998, Pages 101-108

  Irick, Steve ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Long trace profiler; LTP; Mirror measurement errors; Optical metrology

Indexed keywords

ERROR ANALYSIS; FUNCTIONS; PROFILOMETRY; SIGNAL PROCESSING; SPURIOUS SIGNAL NOISE; SYNCHROTRONS;

LONG TRACE PROFILERS (LTP);

MIRRORS;

EID: 0032224467     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.331122     Document Type: Conference Paper

References (15)

1. Long trace profile measurements on cylindrical Aspheres
2. Angle, distance, curvature, and focal length measurements
3. Pencil beam interferometer for aspherical optical surfaces
4. The penta-prism LTP: A long-trace-profiler with stationary optical head and moving penta prism
5. Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler
6. Improved measurement accuracy in a long trace profiler: Compensation for laser pointing instability
7. Significant inprovements in long trace profiler measurement performance
8. Improvement of synchrotron radiation mirrors below the 0.1 arcsec rms slope error limit with the help of a long trace profiler
9. Considerations for mounting the dove prism in the reference beam of the long trace profiler
10. XUV synchrotron optical components for the Advanced Light Source: Summary of the requirements and the developmental program
11. How to measure a long mirror
12. Some parameter measurements
13. Angle calibration of the Long Trace Profiler using a diffraction grating