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Volumn 200, Issue 1-6, 2001, Pages 23-26
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Principle of π-phase plate long trace profiler for synchrotron radiation optics
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Author keywords
Aspherical optics testing; Diffraction optics; Long trace profiler; Metrology for super large surface
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Indexed keywords
ASPHERICS;
DIFFRACTIVE OPTICS;
LASER BEAMS;
OPTICAL FIBERS;
OPTICAL TESTING;
SEMICONDUCTOR LASERS;
SYNCHROTRON RADIATION OPTICS;
SYNCHROTRON RADIATION;
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EID: 0035893094
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/S0030-4018(01)01642-X Document Type: Article |
Times cited : (16)
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References (8)
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