Sub-microradian error sources in pencil beam interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5180, Issue , 2003, Pages 377-384

  Takacs, Peter Z ^a   Qian, Shinan ^a  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

Homogeneity; Interferometer; Profilometry; Roughness; Slope error; Synchrotron optics

Indexed keywords

MIRRORS; OPTICAL BEAM SPLITTERS; OPTICAL SYSTEMS; PROFILOMETRY; SURFACE ROUGHNESS; SYSTEMATIC ERRORS;

INTERNAL GLASS HOMOGENEITY; LONG TRACE PROFILER; MACROROUGHNESS; OPTICAL PATH IRREGULARITIES; PENCIL BEAM INTERFEROMETRY; SURFACE SLOPE ERRORS; SYNCHROTRON RADIATION BEAM LINE OPTICS;

INTERFEROMETRY;

EID: 1842608728     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. P.Z. Takacs, S.K. Feng, E.L. Church, S. Qian, and W.-M. Liu, "Long trace profile measurements on cylindrical aspheres", in Advances in Fabrication and Metrology for Optics and Large Optics, Jones B. Arnold and Robert A. Parks, eds., Proc. SPIE Vol. 966, pp. 354-364, (1989).
2. P.Z. Takacs, K. Furenlind, R. DeBiasse, and E.L. Church, "Surface topography measurements over the 1 meter to 10 micrometer spatial period bandwidth", in Surface Characterization and Testing II, J.E. Grievenkamp and M. Young, eds., Proc. SPIE Vol. 1164, pp. 203-211, (1989).
3. S. Qian, W. Lark, and P. Z. Takacz, "The Penta-Prism LTP: A Long-Trace-Profiler with Stationary Optical Head and Moving Penta-Prism," Review of Scientific Instruments 66 (3), pp. 2562-2569, (1995)
4. J.S. Stroud. "Striae quality grades for optical glass," Optical Engineering 42 (6), pp. 1618-1624, (2003)