Design of multiple-function long trace profiler

Optical Engineering

Volumn 46, Issue 4, 2007, Pages

  Qian, Shinan ^a   Takacs, Peter ^a  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

Accuracy; Large measurement range; Long trace profiler; Multiple function; Multiple function long trace profiler

Indexed keywords

ASPHERICS; ERROR CORRECTION; PRISMS; SYNCHROTRON RADIATION;

LONG TRACE PROFILER; OPTICAL HEAD; OPTICAL METROLOGY; SLOPE ERROR;

PROFILOMETRY;

EID: 34250736888     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2724851     Document Type: Article

References (22)

1. P. Takacs, S. N. Qian, and J. Colbert, "Design of a long trace surface profiler," Proc. SPIE 749, 59-64 (Aug. 1987).
2. P. Takacs and S. N. Qian, "Surface profiling interferometer," U.S. Patent No. U4884697 (Dec. 1989).
3. K. Von Bieren, "Pencil beam interferometer for aspheric optical surfaces," Proc. SPIE 343, 101-108 (1982).
4. S. C. Irick, W. R. McKinney, D. L. Lunt, and P. Takacs, "Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler (for synchrotron optics)," Rev. Sci. Instrum. 63(1), 1436-1438 (1992).
5. S. C. Irick, "Error reduction techniques for measuring long synchrotron mirrors," Proc. SPIE 3447, 101-108 (1998).
6. Y. Zhao, Z. Li, D. Li, T. Xiao, and S. Xia, "Principle of π-phase plate long trace profiler for synchrotron radiation optics," Opt. Commun. 200, 23-26 (2001).
7. S. N. Qian and P. Takacs, "Equal optical path beam splitters by use of amplitude-splitting and wavefront-splitting method for pencil beam interferometer," Proc. SPIE 5193, 79-88 (Aug. 2003).
8. S. N. Qian and P. Takacs, "Wave front-splitting phase shift beam splitter for pencil beam interferometer," Rev. Sci. Instrum. 74(11), 4881-4884 (2003).
9. S. N. Qian, W. Jark, and P. Takacs, "The penta-prism LTP: a long-trace-profiler LTP with stationary optical head and moving pentaprism," Rev. Sci. Instrum. 66(3), 2562-2569 (1995).
10. D. Cocco, A. Bianco, and G. Sostero, "A second optical head for the ELETTR: a long trace profiler," Proc. SPIE 5921, 59210L (Aug. 2005).
11. H. Lammert, F. Senf, and M. Berger, "Improvement of synchrotron radiation mirrors below the 0.1 arcsec rms slope error limit with the help of a long trace profiler," Proc. SPIE 3152, 168-179 (1997).
12. W. R. McKinney, S. C. Irick, and D. L. J. Lunt, "XUV synchrotron optical components for the Advanced Light Source: Summary of the requirements and the developmental program," Proc. SPIE 1740, 154-160 (July 1992).
13. V. V. Yashchuk, "Elimination of ghost effect-related systematics in the x-ray optics metrology with long trace profiler," ALS Beamline Note, LSBL-722, 21 (Apr. 2005).
14. S. N. Qian, Q. Wang, Y. Hong, and P. Takacs, "Multiple functions long trace profiler (LTP-MF) for National Synchrotron Radiation Laboratory of China," Proc. SPIE 5921, 592104 (2005).
15. S. N. Qian, W. Jark, A. Gambitta, F. Mazzolini, and A. Savoia, "Precise measuring method for detection the in situ distortion profile of a high-heat-load mirror for synchrotron radiation by use of a pentaprism long trace profiler," Appl. Opt. 36(16), 1 (1997).
16. S. N. Qian, W. Jark, A. Gambitta, F. Mazzolini, and A. Savoia, "Advantages of the in-situ LTP distortion profile test on high-heat-load mirror and applications," Proc. SPIE 2856, 172-182 (1996).
17. S. N. Qian and P. Takacs, "Precise angle displacement monitoring system based on pencil beam interferometry," Proc. SPIE 4101, 263-272 (2000).
18. S. N. Qian and P. Takacs, "Portable long trace profiler: concept and solution," Rev. Sci. Instrum. 72(8), 3198-3204 (2001).
19. P. Takacs and S. N. Qian, "Accuracy limitations in long-trace profilermetry," in AIP Conf. Proc. Vol. 705, pp. 831-834 (2004).
20. P. Takacs and S. N. Qian, "Sub-microradian error sources in pencil beam interferometry," Proc. SPIE 5180, 377-384 (2003).
21. S. N. Qian and P. Takacs, "Equal optical path beam splitters for a pencil beam interferometer and shearing interferometer," Opt. Eng. 42(4), 929-934 (2003).
22. P. Takacs, E. L. Church, C. J. Bresloff, and L. Assoufid, "Improvements in the accuracy and the repeatability of long trace profiler measurements," Appl. Opt. 38(25), 5468-5479 (1999).