Using emulation to validate a cluster tool simulation model

Winter Simulation Conference Proceedings

Volumn 2, Issue , 2000, Pages 1417-1422

  LeBaron, H Todd ^a   Hendrickson, Ruth Ann ^a  

^a Brooks Automation Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COST EFFECTIVENESS; ROBOT APPLICATIONS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; THROUGHPUT; VACUUM APPLICATIONS;

CLUSTER TOOL SIMULATION;

COMPUTER AIDED MANUFACTURING;

EID: 0034428050     PISSN: 02750708     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)