Scheduling analysis of cluster tools with buffer/process modules

Proceedings - IEEE International Conference on Robotics and Automation

Volumn , Issue , 2007, Pages 985-990

  Yi, Jingang ^a   Ding, Shengwei ^b   Song, Dezhen ^c   Zhang, Mike Tao ^d  

^a UTC Aerospace Systems   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c TEXAS A AND M UNIVERSITY   (United States)

^d INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER TOOLS; DECOMPOSITION METHODS; LOWER-BOUND CYCLE TIME; WAFER PROCESSING;

ALGORITHMS; CHEMICAL VAPOR DEPOSITION; PRODUCTIVITY; ROBOTS; SCHEDULING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 36348949731     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ROBOT.2007.363113     Document Type: Conference Paper

References (12)

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