Interpretation method for mirror experiments based on a Monte Carlo charge implantation model

EPJ Applied Physics

Volumn 20, Issue 1, 2002, Pages 41-53

  Mady, F ^a   Renoud, R ^a   Attard, C ^b   Bigarre J ^b   Ganachaud, J P ^a   Hourquebie, P ^b  

^a UNIVERSITÉ DE NANTES   (France)

^b DIF   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; APPROXIMATION THEORY; COMPUTER SIMULATION; ELECTRIC SPACE CHARGE; ELECTRONIC DENSITY OF STATES; ION IMPLANTATION; MIRRORS; MONTE CARLO METHODS; RELAXATION PROCESSES;

MONTE CARLO CHARGE IMPLANTATION MODEL; MULTIPOLE ANALYSIS; SCANNING ELECTRON MICROSCOPE MIRROR METHOD; SEMI-ELLIPSOIDAL SHELL MODEL;

SCANNING ELECTRON MICROSCOPY;

EID: 0036775333     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:2002074     Document Type: Article

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