Imaging deep trap distributions by low vacuum scanning electron microscopy

Applied Physics Letters

Volumn 90, Issue 7, 2007, Pages

  Toth, Milos ^a   Knowles, W Ralph ^a   Phillips, Matthew R ^b  

^a Thermo Fisher Scientific   (United States)

^b UNIVERSITY OF TECHNOLOGY SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; ELECTRON TRAPS; IMAGING TECHNIQUES; SCANNING ELECTRON MICROSCOPY;

CHARGE GENERATION; CHARGE TRAPS; LOW VACUUM SCANNING ELECTRON MICROSCOPY (LVSEM); SPATIAL VARIATIONS;

DIELECTRIC MATERIALS;

EID: 33847092951     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2644159     Document Type: Article

References (25)

1. See, for example, a recent review by B. L. Thiel and M. Toth, J. Appl. Phys. 97, 051101 (2005).
2. M. Toth, S. O. Kucheyev, J. S. Williams, C. Jagadish, M. R. Phillips, and G. Li, Appl. Phys. Lett. 77, 1342 (2000).
3. M. Toth, B. L. Thiel, and A. M. Donald, Ultramicroscopy 94, 71 (2003).
4. M. Toth, W. R. Knowles, and B. L. Thiel, Appl. Phys. Lett. 88, 023105 (2006).
5. S. N. Zhu and W. W. Cao, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett. 79.2558 79, 2558 (1997); B. J. Griffin, Scanning 22, 234 (2000).
6. S. N. Zhu and W. W. Cao, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett. 79.2558 79, 2558 (1997); B. J. Griffin, Scanning 22, 234 (2000).
7. M. Toth, M. R. Phillips, J. P. Craven, B. L. Thiel, and A. M. Donald, J. Appl. Phys. 91, 4492 (2002).
8. G. Molnár, J. Borossay, M. Benabdesselam, P. Iacconi, D. Lapraz, K. Süvegh, and A. V́tres, Phys. Status Solidi A 0031-8965 10.1002/1521-396X(200005)179:1<249::AID-PSSA249>3.0.CO;2-B 179, 249 (2000); M. Yamaga, T. Yosida, S. Hara, N. Kodama, and B. Henderson, J. Appl. Phys. 75, 1111 (1994).
9. G. Molnár, J. Borossay, M. Benabdesselam, P. Iacconi, D. Lapraz, K. Süvegh, and A. V́tres, Phys. Status Solidi A 0031-8965 10.1002/1521-396X(200005)179:1<249::AID-PSSA249>3.0.CO;2-B 179, 249 (2000); M. Yamaga, T. Yosida, S. Hara, N. Kodama, and B. Henderson, J. Appl. Phys. 75, 1111 (1994).
10. See, for example, J. Cazaux, Scanning 26, 181 (2004), and references therein.
11. M. Toth, M. R. Phillips, B. L. Thiel, and A. M. Donald, J. Appl. Phys. 91, 4479 (2002).
12. J. Cazaux, J. Appl. Phys. 89, 8265 (2001).
13. C. A. Klein, J. Appl. Phys. 0021-8979 10.1063/1.1656484 39, 2029 (1968); G. A. Ausman, Jr. and F. B. McLean, Appl. Phys. Lett. 0003-6951 10.1063/1.88104 26, 173 (1975); R. C. Alig, S. Bloom, and C. W. Struck, Phys. Rev. B 0163-1829 10.1103/PhysRevB.22.5565 22, 5565 (1980); R. C. Alig, Phys. Rev. B 27, 968 (1983).
14. C. A. Klein, J. Appl. Phys. 0021-8979 10.1063/1.1656484 39, 2029 (1968); G. A. Ausman, Jr. and F. B. McLean, Appl. Phys. Lett. 0003-6951 10.1063/1.88104 26, 173 (1975); R. C. Alig, S. Bloom, and C. W. Struck, Phys. Rev. B 0163-1829 10.1103/PhysRevB.22.5565 22, 5565 (1980); R. C. Alig, Phys. Rev. B 27, 968 (1983).
15. C. A. Klein, J. Appl. Phys. 0021-8979 10.1063/1.1656484 39, 2029 (1968); G. A. Ausman, Jr. and F. B. McLean, Appl. Phys. Lett. 0003-6951 10.1063/1.88104 26, 173 (1975); R. C. Alig, S. Bloom, and C. W. Struck, Phys. Rev. B 0163-1829 10.1103/PhysRevB.22.5565 22, 5565 (1980); R. C. Alig, Phys. Rev. B 27, 968 (1983).
16. C. A. Klein, J. Appl. Phys. 0021-8979 10.1063/1.1656484 39, 2029 (1968); G. A. Ausman, Jr. and F. B. McLean, Appl. Phys. Lett. 0003-6951 10.1063/1.88104 26, 173 (1975); R. C. Alig, S. Bloom, and C. W. Struck, Phys. Rev. B 0163-1829 10.1103/PhysRevB.22.5565 22, 5565 (1980); R. C. Alig, Phys. Rev. B 27, 968 (1983).
17. R. C. Alig and S. Bloom, Phys. Rev. Lett. 35, 1522 (1975).
18. J. Cazaux, Nucl. Instrum. Methods Phys. Res. B 244, 307 (2006).
19. J. Cazaux, Nucl. Instrum. Methods Phys. Res. B 192, 381 (2002).
20. K. Kanaya, S. Ono, and F. Ishigaki, J. Phys. D 11, 2425 (1978).
21. E. Schreiber and H. J. Fitting, J. Electron Spectrosc. Relat. Phenom. 0368-2048 10.1016/S0368-2048(01)00368-1 124, 25 (2002); X. Meyza, D. Goeuriot, C. Guerret-Piecourt, D. Treheux, and H. J. Fitting, J. Appl. Phys. 94, 5384 (2003).
22. E. Schreiber and H. J. Fitting, J. Electron Spectrosc. Relat. Phenom. 0368-2048 10.1016/S0368-2048(01)00368-1 124, 25 (2002); X. Meyza, D. Goeuriot, C. Guerret-Piecourt, D. Treheux, and H. J. Fitting, J. Appl. Phys. 94, 5384 (2003).
23. P. Hovington, D. Drouin, and R. Gauvin, Scanning 0161-0457 19, 1 (1997); M. Toth and M. R. Phillips, Scanning 20, 425 (1998).
24. P. Hovington, D. Drouin, and R. Gauvin, Scanning 0161-0457 19, 1 (1997); M. Toth and M. R. Phillips, Scanning 20, 425 (1998).
25. Cv. McCaught, R. A. Kushner, and V. T. Murphy, Phys. Rev. Lett. 30, 614 (1973).