Ta nanotubes grown by glancing angle deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 2, 2008, Pages 678-681

  Kesapragada, S V ^a   Sotherland, P R ^a   Gall, D ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GLANCING ANGLE DEPOSITION (GLAD); PATTERNED RINGS;

CHROMIUM COMPOUNDS; LITHOGRAPHY; NANORODS; TANTALUM;

NANOTUBES;

EID: 41549098694     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2842299     Document Type: Article

References (38)

1. K. Robbie, M. J. Brett, and A. Lakhtakia, Nature (London) 0028-0836 10.1038/384616a0 384, 616 (1996).
2. R. Azzam, Appl. Phys. Lett. 0003-6951 10.1063/1.107979 61, 3118 (1992).
3. R. Messier, V. C. Venugopal, and P. D. Sunal, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.582381 18, 1538 (2000).
4. K. Robbie, D. J. Broer, and M. J. Brett, Nature (London) 0028-0836 10.1038/21612 399, 764 (1999).
5. K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.580562 15, 1460 (1997).
6. B. Dick, M. J. Brett, and T. Smy, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1627334 21, 2569 (2003).
7. B. Dick, M. J. Brett, T. J. Smy, M. R. Freeman, M. Malac, and R. F. Egerton, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.582481 18, 1838 (2000).
8. S. R. Kennedy and M. J. Brett, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1752903 22, 1184 (2004).
9. D. -X. Ye, T. Karabacak, R. C. Picu, G. -C. Wang, and T. -M. Lu, Nanotechnology 0957-4484 10.1088/0957-4484/16/9/052 16, 1717 (2005).
10. S. V. Kesapragada and D. Gall, Thin Solid Films 0040-6090 10.1016/j.tsf.2005.08.128 494, 234 (2006).
11. Y. -P. Zhao, D. -X. Ye, G. -C. Wang, and T. -M. Lu, Nano Lett. 1530-6984 10.1021/nl0157041 2, 351 (2002).
12. J. Wang, H. Huang, S. V. Kesapragada, and D. Gall, Nano Lett. 1530-6984 10.1021/nl0518425 5, 2505 (2005).
13. C. M. Zhou and D. Gall, Appl. Phys. Lett. 0003-6951 10.1063/1.2204759 88, 203117 (2006).
14. S. V. Kesapragada and D. Gall, Appl. Phys. Lett. 0003-6951 10.1063/1.2388861 89, 203121 (2006).
15. M. Suzuki and Y. Taga, J. Appl. Phys. 0021-8979 10.1063/1.351368 71, 2848 (1992).
16. I. J. Hodgkinson and Q. H. Wu, Opt. Eng. 0091-3286 10.1117/1.601763 37, 2630 (1998).
17. A. Lisfi and J. C. Lodder, Phys. Rev. B 0163-1829 10.1103/PhysRevB.63. 174441 63, 174441 (2001).
18. P. C. P. Hrudey, A. C. Van Popta, J. C. Sit, and M. J. Brett, Proc. SPIE 5931, 593113 (2005).
19. S. V. Kesapragada, P. Victor, O. Nalamasu, and D. Gall, Nano Lett. 1530-6984 10.1021/nl060122a 6, 854 (2006).
20. J. P. Singh, F. Tang, T. Karabacak, T. -M. Lu, and G. -C. Wang, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1736642 22, 1048 (2004).
21. J. P. Singh, D. -L. Liu, D. -X. Ye, R. C. Picu, T. -M. Lu, and G. -C. Wang, Appl. Phys. Lett. 0003-6951 10.1063/1.1738935 84, 3657 (2004).
22. C. M. Zhou and D. Gall, J. Appl. Phys. 0021-8979 10.1063/1.2828174 103, 014307 (2008).
23. M. Malac and R. F. Egerton, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1326940 19, 158 (2001).
24. K. Robbie, C. Shafai, and M. J. Brett, J. Mater. Res. 14, 3158 (1999). 0884-2914
25. C. M. Zhou and D. Gall, Thin Solid Films 0040-6090 10.1016/j.tsf.2007.05. 069 516, 433 (2007).
26. W. Kern and D. A. Puotinent, RCA Rev. 31, 187 (1970).
27. M. Inoue, K. Hashizume, and H. Tsuchikawa, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.575298 6, 1636 (1988).
28. J. Lu and M. J. Kushner, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1399318 19, 2652 (2001).
29. H. Otto, Y. Ushiku, and T. Yoda, in Proc. IIXE VLSI Multilevel Interconnection Conf. (V-MIC) (IEEE, New York, 1990), IEEE Cat. 9OTH0325-1, p. 76.
30. Y. Homma and S. Tsunekawa, J. Electrochem. Soc. 0013-4651 10.1149/1.2114145 132, 1466 (1985).
31. D. W. Skelly and L. A. Gruerke, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.573905 4, 457 (1986).
32. C. M. Zhou and D. Gall, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.2539328 25, 312 (2007).
33. C. M. Zhou and D. Gall, Appl. Phys. Lett. 0003-6951 10.1063/1.2709929 90, 093103 (2007).
34. M. Malac, R. F. Egerton, M. J. Brett, and B. Dick, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.591046 17, 2671 (1999).
35. C. M. Zhou and D. Gall, Thin Solid Films 0040-6090 10.1016/j.tsf.2006.07. 136 515, 1223 (2006).
36. R. Nagar, B. R. Mehta, J. P. Singh, D. Jain, V. Ganesan, S. V. Kesapragada, and D. Gall, J. Vac. Sci. Technol. A 0734-2101 (to be published).
37. C. Roland and H. Guo, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.66. 2104 66, 2104 (1991).
38. J. H. Yao, C. Roland, and H. Guo, Phys. Rev. A 1050-2947 10.1103/PhysRevA.45.3903 45, 3903 (1992).