Observations of the microscopic growth mechanism of pillars and helices formed by glancing-angle thin-film deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 1, 2001, Pages 158-166

  Malac, Marek ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISPERSIVE SPECTROSCOPY; EVAPORATION; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY; VACUUM APPLICATIONS;

DIFFUSION PUMPED VACUUM SYSTEM; ELECTRON BEAM DEPOSITION; GLANCING ANGLE DEPOSITION; MICROSCOPIC GROWTH MECHANISMS;

THIN FILMS;

EID: 0035101202     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1326940     Document Type: Article

References (2)

1. K. Robbie, M. J. Brett, and A. Lakhtakia, J. Vac. Sci. Technol. A 13, 2991 (1995).
2. K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997).