The structure of Ta nanopillars grown by glancing angle deposition

Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 1223-1227

  Zhou, C M ^a   Gall, D ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Glanoing angle deposition (GLAD); Nanosphere; Patterning; Ta

Indexed keywords

NUCLEATION; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TANTALUM; THERMAL EFFECTS;

GLANOING ANGLE DEPOSITION (GLAD); GROWTH TEMPERATURE; INTERCOLUMNAR COMPETITION; NANOSPHERE;

NANOSTRUCTURED MATERIALS;

EID: 33750469026     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.136     Document Type: Article

References (22)

1. Robbie K., and Brett M.J. J. Vac. Sci. Technol., A 15 (1997) 1460
2. Malac M., Egerton R.F., Brett M.J., and Dick B. J. Vac. Sci. Technol., B 17 6 (1999) 2671
3. Robbie K., Shafai C., and Brett M.J. J. Mater. Res. 14 7 (1999) 3158
4. Dick B., Brett M.J., and Smy T. J. Vac. Sci. Technol., B 21 1 (2003) 23
5. Malac M., and Egerton R.F. J. Vac. Sci. Technol., A 19 (2001) 158
6. Messier R., Venugopal V.C., and Sunal P.D. J. Vac. Sci. Technol., A 18 (2000) 1538
7. Zhao Y.-P., Ye D.-X., Wang P.-I., Wang G.-C., and Lu T.-M. Int. J. Nanosci. 1 (2002) 87
8. Kennedy S., Brett M.J., Toader O., and John S. Nano Lett. 2 1 (2001) 59
9. Ye D.-X., Karabacak T., Picu R.C., Wang G.-C., and Lu T.-M. Nanotechnology 16 (2005) 1717
10. Wang J., Huang H., Kesapragada S.V., and Gall D. Nano Lett. 5 (2005) 2505
11. Kesapragada S.V., and Gall D. Thin Solid Films 494 (2006) 234
12. Kennedy S., Brett M.J., Miguez H., Toader O., and John S. Photon. Nanostruct. Fundam. Appl. 1 (2003) 37
13. Dick B., Brett M.J., Smy T.J., Freeman M.R., Malac M., and Egerton F. J. Vac. Sci. Technol., A 18 (2000) 1838
14. Lisfi A., and Lodder J.C. Phys. Rev., B 63 (2001) 17441
15. Alouach H., Fujiwara H., and Mankey G.J. J. Vac. Sci. Technol., A 23 (2001) 1046
16. Singh J.P., Tang F., Karabacak T., Lu T.-M., and Wang G.-C. J. Vac. Sci. Technol., B 33 3 (2004) 1048
17. Kesapragada S.V., Victor P., Nalamasu O., and Gall D. Nano Lett. 6 (2006) 854
18. Lakhtakia A. Mater. Sci. Eng., C, Biomim. Mater., Sens. Syst. 19 (2002) 427
19. Micheletto R., Fukuda H., and Ohtsu M. Langmuir 11 (1995) 3333
20. Kaver P., and Thijsse B. Thin Solid Films 413 (2002) 110
21. C.M. Zhou, D. Gall, J. Vac. Sci. Technol. A submitted for publication.
22. Zhou C.M., and Gall D. Appl. Phys. Lett. 88 (2006) 203117