Surface patterning by nanosphere lithography for layer growth with ordered pores

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 433-437

  Zhou, C M ^a   Gall, D ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Glancing angle deposition; Nanosphere lithography; Porous layers; Ta

Indexed keywords

MONOLAYERS; NANOSPHERES; SELF ASSEMBLY; SILICON; THIN FILMS;

GLANCING ANGLE DEPOSITION; NANOSPHERE LITHOGRAPHY; POROUS LAYERS;

LITHOGRAPHY;

EID: 36048962400     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.05.069     Document Type: Article

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