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Volumn 65, Issue 6, 2002, Pages
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Analytic solution for low-frequency rf sheaths in pulsed discharges
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Author keywords
[No Author keywords available]
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Indexed keywords
ION PLASMA FREQUENCY;
ION-ION PLASMAS;
KIRCHOFF'S LAW;
RADIO-FREQUENCY-DRIVEN PLASMA SHEATHS;
ANISOTROPY;
CAPACITANCE;
CARRIER CONCENTRATION;
ELECTRODES;
MATHEMATICAL MODELS;
ORDINARY DIFFERENTIAL EQUATIONS;
PLASMA SHEATHS;
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EID: 41349110134
PISSN: 1063651X
EISSN: None
Source Type: Journal
DOI: 10.1103/PhysRevE.65.066407 Document Type: Article |
Times cited : (5)
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References (43)
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