Kinetic Modeling of Positive Ions in a Low-Pressure Rf Discharge

IEEE Transactions on Plasma Science

Volumn 19, Issue 2, 1991, Pages 245-249

  Goedheer, Willem Jan ^a   Meijer, Peter M ^a  

^a FOM INSTITUTE FOR PLASMA PHYSICS RIJNHUIZEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER PROGRAMMING; IONS; PLASMAS--SHEATHS;

BOLTZMANN EQUATION; RF DISCHARGES;

ELECTRIC DISCHARGES;

EID: 0026138367     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.106820     Document Type: Article

References (16)

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