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Volumn 22, Issue 1, 2005, Pages 29-34

Shrinking the pirani vacuum gauge

Author keywords

[No Author keywords available]

Indexed keywords


EID: 27844476813     PISSN: 07469462     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review
Times cited : (3)

References (13)
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    • Bloom, D.M.1
  • 6
    • 1942468586 scopus 로고    scopus 로고
    • A micromachined 232 optical switch aligned with bevel-ended fibers for low return loss
    • K. Kwon, "A Micromachined 232 Optical Switch Aligned With Bevel-Ended Fibers for Low Return Loss," J Microelectromechanical Systems, Vol. 13, 2004, p. 258.
    • (2004) J Microelectromechanical Systems , vol.13 , pp. 258
    • Kwon, K.1
  • 7
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    • Scanning probe microscopy
    • M.A. Poggi et al., "Scanning Probe Microscopy," Anal Chem, Vol. 76, 2004, p. 3429.
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    • Poggi, M.A.1
  • 8
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    • A BioMEMS review: MEMS technology for physiologically integrated devices
    • A.C. Richards Grayson et al., "A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices," Proc IEEE, Vol. 92, No. 6, 2004.
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    • Grayson, A.C.R.1
  • 11
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    • Alvesteffer, W.J.1
  • 12
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    • Metrological properties of the thermal conductivity gauge
    • W. Jiatschin and M. Ruschitzka, "Metrological properties of the thermal conductivity gauge," Vacuum, Vol. 44, 1993, p. 607.
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  • 13
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    • MKS enlarges opportunities in vacuum sensing
    • June , excerpted in Sensors Online
    • P. Adrien, "MKS Enlarges Opportunities in Vacuum Sensing," Sensor Business Digest, June 2003, excerpted in Sensors Online.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.