-
2
-
-
0030171958
-
Silicon micromachining for integrated microsystems
-
M. Esashi, "Silicon Micromachining for Integrated Microsystems," Vacuum, Vol. 47, 1996, p. 469.
-
(1996)
Vacuum
, vol.47
, pp. 469
-
-
Esashi, M.1
-
3
-
-
0032136371
-
Vacuum-sealed silicon micromachined pressure sensors
-
M. Esashi et al., "Vacuum-Sealed Silicon Micromachined Pressure Sensors," Proc IEEE, Vol. 86, 1998.
-
(1998)
Proc IEEE
, vol.86
-
-
Esashi, M.1
-
4
-
-
0346924374
-
An overview of MEMS inertial sensing technology
-
Feb.
-
J. Bernstein, "An Overview of MEMS Inertial Sensing Technology," Sensors, Feb. 2003.
-
(2003)
Sensors
-
-
Bernstein, J.1
-
5
-
-
0001531811
-
The grating light valve: Revolutionizing display technology
-
D.M. Bloom, "The Grating Light Valve: revolutionizing display technology," Proc SPIE, 1998, p. 3013.
-
(1998)
Proc SPIE
, pp. 3013
-
-
Bloom, D.M.1
-
6
-
-
1942468586
-
A micromachined 232 optical switch aligned with bevel-ended fibers for low return loss
-
K. Kwon, "A Micromachined 232 Optical Switch Aligned With Bevel-Ended Fibers for Low Return Loss," J Microelectromechanical Systems, Vol. 13, 2004, p. 258.
-
(2004)
J Microelectromechanical Systems
, vol.13
, pp. 258
-
-
Kwon, K.1
-
7
-
-
2942530365
-
Scanning probe microscopy
-
M.A. Poggi et al., "Scanning Probe Microscopy," Anal Chem, Vol. 76, 2004, p. 3429.
-
(2004)
Anal Chem
, vol.76
, pp. 3429
-
-
Poggi, M.A.1
-
8
-
-
11144236389
-
A BioMEMS review: MEMS technology for physiologically integrated devices
-
A.C. Richards Grayson et al., "A BioMEMS Review: MEMS Technology for Physiologically Integrated Devices," Proc IEEE, Vol. 92, No. 6, 2004.
-
(2004)
Proc IEEE
, vol.92
, Issue.6
-
-
Grayson, A.C.R.1
-
11
-
-
1842447961
-
Miniaturized thin film vacuum sensor
-
W.J. Alvesteffer et al., "Miniaturized Thin Film Vacuum Sensor," J Vac Sci Technol A, Vol. 13, 1995, p. 2980.
-
(1995)
J Vac Sci Technol A
, vol.13
, pp. 2980
-
-
Alvesteffer, W.J.1
-
12
-
-
0027589833
-
Metrological properties of the thermal conductivity gauge
-
W. Jiatschin and M. Ruschitzka, "Metrological properties of the thermal conductivity gauge," Vacuum, Vol. 44, 1993, p. 607.
-
(1993)
Vacuum
, vol.44
, pp. 607
-
-
Jiatschin, W.1
Ruschitzka, M.2
-
13
-
-
27844499200
-
MKS enlarges opportunities in vacuum sensing
-
June , excerpted in Sensors Online
-
P. Adrien, "MKS Enlarges Opportunities in Vacuum Sensing," Sensor Business Digest, June 2003, excerpted in Sensors Online.
-
(2003)
Sensor Business Digest
-
-
Adrien, P.1
|