A micromachined Pirani gauge with dual heat sinks

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 532-535

  Chae, Junseok ^a   Stark, Brian H ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Packaging; Pirani gauge; Pressure sensor

Indexed keywords

PACKAGE QUALITY; PIRANI GAUGE; PRESSURE SENSORS; SENSOR DRIFT;

GAGES; HEAT SINKS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MONITORING; PACKAGING; PRESSURE EFFECTS; SENSORS; THERMAL CONDUCTIVITY; VACUUM TECHNOLOGY;

MICROMACHINING;

EID: 3042743806     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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