An improved performance poly SI PIRANI vacuum gauge using heat distributing structural supports

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 291-294

  Mitchell, Jay ^a   Lahiji, G R ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEASUREMENT ACCURACY; MICRO-PIRANI GAUGE; PARALLEL BRIDGES; STRUCTURAL RIGIDITY;

BEAMS AND GIRDERS; CROSSLINKING; POLYSILICON; PRESSURE MEASUREMENT; RIGIDITY; SENSORS;

VACUUM GAGES;

EID: 26844532936     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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2. N. R. Swart and A. Nathan, "An Integrated CMOS Polysilicon Coil-Based Micro-Pirani Gauge with High Heat Transfer Efficiency," Technical Digest -International Electron Devices Meeting, 1994, pp. 135-138.
3. J. Chae, B.H. Stark, K. Najafi, "A Micromachined Pirani Gauge with Dual Heat Sinks," Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2004, pp. 532-535.
4. B.H. Stark, Y. Mei, C. Zhang, K. Najafi, "A Doubly Anchored Surface Mircromachined Pirani Gauge for Vacuum Packaging Characterization," Proceedings of the IEEE Electro Mechanical Systems (MEMS), 2003, pp. 506-509.
5. J.S Shie, B.C.S. Chou and Y.M. Chen, "High performance Pirani Vacuum Gauge," J. Vac. Sci Technol. A 13 (6), 1995, pp. 2972-2979.
6. C. H. Mastrangelo and R.S. Muller, "Microfavricated Thermal Absolute-Pressure Sensor with On-Chip Digital Front-End Processor," IEEE Journal of Solid-State Circuits, 26 (12), 1991, pp. 1998-2007.
7. A. Jacquot, W.L. Liu, G. Chen, J.-P. Fleurial, A. Dauscher, B. Lenoir, "Figure-of-merit and emissivity measurement of fim-grain polycrystalline silicon thin films," Proceedings of the 21th International Conference on Thermoelectrics (Long Beach, USA), 2002, pp. 118-121.