Electrical, structural, and optical properties of ITO thin films prepared at room temperature by pulsed laser deposition

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4834-4837

  Kim, Jong Hoon ^a   Jeon, Kyung Ah ^a   Kim, Gun Hee ^a   Lee, Sang Yeol ^a  

^a Yonsei University   (South Korea)

Author keywords

Indium tin oxide (ITO); Pulsed laser deposition (PLD); Rapid thermal annealing (RTA); Transparent conducting oxide (TCO)

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; ELECTRIC PROPERTIES; GLASS; INDIUM COMPOUNDS; OPTICAL PROPERTIES; PULSED LASER DEPOSITION; RAPID THERMAL ANNEALING; TRANSPARENCY; X RAY DIFFRACTION;

FOUR-POINT PROBE METHOD; INDIUM TIN OXIDE (ITO); OXYGEN PRESSURE; TRANSPARENT CONDUCTING OXIDE (TCO);

THIN FILMS;

EID: 33646570268     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.134     Document Type: Article

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