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Volumn 515, Issue 15 SPEC. ISS., 2007, Pages 6045-6050

Properties of indium tin oxide films deposited using High Target Utilisation Sputtering

Author keywords

Indium tin oxide; Polyimide; Sputtering; TCO

Indexed keywords

DEPOSITION; FLOW RATE; HEAT TREATMENT; HEATING; INDIUM COMPOUNDS; POLYIMIDES; SOLAR CELLS; SPUTTERING; THERMODYNAMIC STABILITY; VACUUM;

HIGH SUBSTRATE TEMPERATURE; HIGH TARGET UTILISATION SPUTTERING (HITUS); INDIUM TIN OXIDE; OXYGEN FLOW; TRANSMITTANCE;

THIN FILMS;

EID: 34247373763 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2006.12.063 Document Type: Article

Times cited : (30)

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