Effects of bias voltage on the properties of ITO films prepared on polymer substrates

Thin Solid Films

Volumn 480-481, Issue , 2005, Pages 157-161

  Lee, Jaehyeong ^a   Jung, Hakkee ^a   Lim, Donggun ^b   Yang, Keajoon ^b   Song, Woochang ^c   Yi, Junsin ^c  

^a Kunsan National University   (South Korea)

^b Chungju National University   (South Korea)

^c Sungkyunkwan University   (South Korea)

Author keywords

Bias; Indium tin oxide (ITO); Magnetron sputtering; Organic substrate

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; FILM PREPARATION; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYCARBONATES;

BIAS VOLTAGE; DEPOSITION RATE; INDIUM TIN OXIDE (ITO); ORGANIC SUBSTRATE;

THIN FILMS;

EID: 18444370288     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.144     Document Type: Conference Paper

References (11)

1. J.M. Margolis Conductive Polymers and Plastics 1989 Chapman & Hall London
2. Z.W. Yang, S.H. Han, T.L. Yang, Lina Ye, D.H. Zhang, H.L. Ma, and C.F. Cheng Thin Solid Films 366 2000 4
3. N. Danson, I. Safi, G.W. Hall, and R.P. Howson Surf. Coat. Technol. 99 1998 147
4. R.D. Bland, G.J. Kominiak, and D.M. Mattox J. Vac. Sci. Technol. 11 1974 671
5. E. Kubota, Y. Shigesato, M. Igarashi, and K. Suzuki Jpn. J. Appl. Phys. 33 1994 4997
6. Z. Yang, Shenghao Han, Tianlin Yang, Lina Ye, Honglei Ma, and Chuanfu Cheng Appl. Surf. Sci. 161 2000 279
7. A. Mansingh, and C.V.R. Vasant Kumar Thin Solid Films 167 1988 L11
8. A. Mukherjee Vacuum 39 1989 537
9. A.K. Kulkarni, K.H. Schulz, T.S. Lim, and M. Khan Thin Solid Films 308 1997 1
10. S. Honda, K. Chihara, M. Watamori, and K. Oura Appl. Surf. Sci. 113/114 1997 408
11. G. Frank, E. Kauer, and H. Köstlin Thin Solid Films 77 1981 107