Low temperature deposition of ITO on organic films by using negative ion assisted dual magnetron sputtering system

Vacuum

Volumn 81, Issue 3, 2006, Pages 279-284

  Kim, Daeil ^a  

^a University of Ulsan   (South Korea)

Author keywords

Atomic force microscopy; Ion beam; ITO; Optical transmittance

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTRIC CONDUCTIVITY; ION BOMBARDMENT; IONIZATION; MAGNETRON SPUTTERING; OPACITY; POLYCARBONATES; SURFACE ROUGHNESS;

METAL ION DEPOSITION; POLYCARBONATE FILMS; REACTIVE OXYGEN GAS;

INDIUM COMPOUNDS;

EID: 33749040450     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2006.04.003     Document Type: Article

References (17)

1. Yang Z. Thin Solid Films 366 (2000) 4
2. Chen J., and Ge Xs. Int J Thermophys 21 (2000) 269
3. Yaglioglu B., Huang Y., Yeom H., and Paine D. Thin Solid Films 496 (2006) 89
4. Liu C., Matsutani T., Asanuma T., and Kiuchi M. Nucl Instrum Methods Phys Res B 206 (2003) 348
5. Kim D., and Kim S. Thin Solid Films 408 (2002) 218
6. Adurodija F.O., Izumi H., and Ishihara T. Vacuum 59 (2000) 641
7. Kim D., and Kim S. J Vac Sci Technol A 20 (2002) 1314
8. Tompa G., Carr W., and Seidl M. Surf Sci 198 (1988) 431
9. Alton G., Liu Y., Williams C., and Murray S. Nucl Instrum Methods B 170 (2000) 15
10. Sohn M., Kim D., Ahn Y., and Kim S. Mater Res Soc Symp Proc 438 (1997) 375
11. Chiou B., and Hsieh S. Thin Sold Films 229 (1993) 146
12. Kim D., and Kim S. Surf Coat Technol 154 (2002) 204
13. Kim D. Appl Surf Sci 218 (2003) 79
14. Lee W.J. Solid State Electron 46 (2002) 477
15. Zhang K., Zhu F., Huan C., and Wee A. Thin Solid Films 376 (2000) 255
16. Ray S., Banerjee R., Basu N., Batabyal A., and Barua A. J Appl Phys 54 (1983) 3497
17. Haacke G. J Appl Phys 47 (1976) 4086