The effect of hydrogen irradiation and annealing on the low-temperature growth of homoepitaxial ZnO layers grown on (0 0 0 1) ZnO substrates by plasma-assisted molecular beam epitaxy

Applied Surface Science

Volumn 254, Issue 10, 2008, Pages 3120-3124

  Park, S H ^a   Suzuki, H ^a   Chang, J H ^c   Minegishi, T ^a   Park, J S ^a   Im, I H ^a   Fujimoto, G ^a   Hanada, T ^a   Oh, D C ^d   Cho, M W ^a,b   Yao, T ^a,b  

^a TOHOKU UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c Korea Maritime University   (South Korea)

^d Hoseo University   (South Korea)

Author keywords

Hydrogen; Low temperature growth; Surfactant

Indexed keywords

ANNEALING; HYDROGEN; IRRADIATION; LINEWIDTH; MOLECULAR BEAM EPITAXY; PHOTOLUMINESCENCE; ZINC OXIDE;

LOW-TEMPERATURE GROWTH; TERRACE LENGTH; X-RAY ROCKING CURVES;

EPITAXIAL GROWTH;

EID: 39649088437     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.10.083     Document Type: Article

References (28)

1. Liu W., Gu S.L., Ye J.D., Zhu S.M., Liu S.M., Zhou X., Zhang R., Shi Y., and Zheng Y.D. Appl. Phys. Lett. 88 (2006) 092101
2. Look D.C., Reynolds D.C., Litton C.W., Jones R.L., Eason D.B., and Cantwell G. Appl. Phys. Lett. 81 (2002) 1830
3. Wang J., Du G., Zhao B., Yang X., Zhang Y., Ma Y., Liu D., Chang Y., Wang H., Yang H., and Yang S. J. Cryst. Growth 255 (2003) 293
4. Huang J., Ye Z., Chen H., Zhao B., and Wang L. J. Mater. Sci. Lett. 22 (2003) 249
5. Guo X.L., Tabata H., and Kawai T. J. Cryst. Growth 223 (2001) 135
6. Kim K.K., Kim H.S., Hwang D.K., Lim J.H., and Park S.J. Appl. Phys. Lett. 83 (2003) 63
7. Limpijumnong S., Smith M.F., and Zhang S.B. Appl. Phys. Lett. 89 (2006) 222113
8. Taike A., Migita M., and Yamamoto H. Appl. Phys. Lett. 56 (1990) 1989
9. Chang J.H., Takai T., Koo B.H., Song J.S., Hanada T., and Yao T. Appl. Phys. Lett. 79 (2001) 785
10. Akasaki I., Amano H., Koide N., Kotaki M., and Manabe K. Phys. B 185 (1993) 428
11. Ryu Y.R., Lee T.S., and White H.W. Appl. Phys. Lett. 83 (2003) 87
12. Hwang D.K., Kang S.H., Lim J.H., Yang E.J., Oh J.Y., Yang J.H., and Park S.J. Appl. Phys. Lett. 86 (2005) 222101
13. Tsukazaki A., Ohtomo A., Onuma T., Ohtani M., Makino T., Sumiya M., Ohtani K., Chichibu S., Fuke S., Segawa Y., Ohno H., Koinuma H., and Kawasaki M. Nat. Mater. 4 (2005) 42
14. Tsukazaki A., Saito H., Tamura K., Ohtani M., Koinuma H., Sumiya M., Fuke S., Fukumura T., and Kawasaki M. Appl. Phys. Lett. 81 (2002) 235
15. Sumiya M., Fuke S., Tsukazaki A., Tamura K., Ohtomo A., Kawasaki M., and Koinuma H. J. Appl. Phys. 93 (2003) 2562
16. Ko H.J., Chen Y., Hong S.K., and Yao T. J. Appl. Phys. 92 (2002) 4354
17. Cho M.W., Harada C., Suzuki H., Minegishi T., Yao T., Ko H., Maeda K., and Nikura I. Superlattice Microstructure 38 (2005) 349
18. Suzuki H., Minegishi T., Fujimoto G., Cho M.W., and Yao T. J. Kor. Phys. Soc. 49 (2006) 1266
19. Copel M., and Tromp R.M. Phys. Rev. Lett. 72 (1994) 1236
20. Maki H., Sakaguchi I., Ohashi N., Sekiguchi S., Haneda H., Tanaka J., and Ichinose N. Jpn. J. Appl. Phys. 42 (2003) 75
21. Qiu C.J.Y., Nikishin S.A., and Temkin H. Appl. Phys. Lett. 74 (1999) 3516
22. Chun Y.J., Okada Y., and Kawabe M. J. Cryst. Growth 150 (1995) 497
23. Sano M., Miyamoto K., Yao T., and Kato H. J. Appl. Phys. 95 (2004) 5527
24. Wenckstern H.V., Schmidt H., Hanisch C., Brandt M., Czekalla C., Benndorf G., Biehne G., Rahm A., Hochmuth H., Lorenz M., and Grundmann M. Phys. Stat. Sol. (PRL) 4 (2007) 129
25. Ishii A., Aisaka T., Oh J.W., Yoshita M., and Akiyama H. Appl. Phys. Lett. 83 (2003) 4187
26. Meyer B.K., Alves H., Hofmann D.M., Kriegseis W., Forster D., Bertram F., Christen J., Hoffmann A., Strabburg M., Dworzak M., and Haboeck U. Phys. Stat. Sol. B 241 (2004) 231
27. Alves H., Pfisterer D., Zeuner A., Riemann T., Christen J., Hofmann D.M., and Meyer B.K. Opt. Mater. 23 (2003) 33
28. Reynolds D.C., Look D.C., Jogai B., and Collins T.C. Appl. Phys. Lett. 79 (2001) 3794