Electrical, optical, and structural characteristics of Al2O 3 thin films prepared by pulsed ultrasonic sprayed pyrolysis

Journal of Applied Physics

Volumn 103, Issue 3, 2008, Pages

  Carmona Tellez, S ^a   Guzman Mendoza, J ^a   Aguilar Frutis, M ^a   Alarcon Flores, G ^a   Garcia Hipolito, M ^b   Canseco, M A ^b   Falcony, C ^c  

^a INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

^b UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^c DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; PYROLYSIS; SILICON; THERMAL EFFECTS;

DEPOSITED FILMS; ULTRASONIC SPRAYED PYROLYSIS;

THIN FILMS;

EID: 39349085211     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2838467     Document Type: Article

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