SCOPUS 정보 검색 플랫폼

Journal of Physics Condensed Matter

Volumn 13, Issue 50, 2001, Pages

Structural characteristics of Al2O3 thin films prepared by spray pyrolysis

(4) Guzman Mendoza J a,b Garcia Hipolito M a,b Aguilar Frutis, M b Falcony Guajardo, C c

a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

b INSTITUTO POLITÉCNICO NACIONAL (Mexico)

c DEPARTAMENTO DE FÍSICA (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CRYSTAL STRUCTURE; DEPOSITION; ELECTRON DIFFRACTION; FILM PREPARATION; LATTICE CONSTANTS; PYROLYSIS; SILICON WAFERS; SPRAYING; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS STRUCTURES;

THIN FILMS;

EID: 0035905401 PISSN: 09538984 EISSN: None Source Type: Journal
DOI: 10.1088/0953-8984/13/50/101 Document Type: Article

Times cited : (20)

References (14)

1
- 0032292720
- (1998) IEEE Electron Device Lett. , vol.11 , pp. 502
- Jin, Z.¹ Kwok, H.S.² Wong, M.³

2
- 84916809891
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2259
- Sundgren, J.E.¹ Hentzel, H.T.² Hentzel, G.³

3
- 0001369713
- (1969) IEEE Trans. Electron Devices , vol.16 , pp. 333
- Zaininger, K.H.¹ Waxmann, A.S.²

4
- 0031208334
- (1997) Thin Solid Films , vol.305 , pp. 243
- Hirschauer, B.¹ Soderholm, S.² Chiala, G.³ Karlsson, U.O.⁴

5
- 0035372138
- (2001) Thin Solid Films , vol.388 , pp. 50
- Ruppi, S.¹ Larsson, A.²

6
- 0035372194
- (2002) Thin Solid Films , vol.388 , pp. 290
- Whangbo, S.W.¹ Choi, Y.K.² Jang, H.K.³ Chung, Y.D.⁴ Lyo, I.W.⁵ Whang, C.N.⁶

7
- 0032489769
- (1998) Appl. Phys. Lett. , vol.72 , pp. 1700
- Aguilar-Frutis, M.¹ García, M.² Falcony, C.³

8
- 0035876764
- (2001) Thin Solid Films , vol.389 , Issue.1-2 , pp. 200
- Aguilar-Frutis, M.¹ García, M.² Falcony, C.³ Plesch, G.⁴ Jiménez-Sandoval, S.⁵

9
- 0019317948
- (1981) Thin Solid Films , vol.77 , pp. 81
- Blandenet, G.¹ Court, M.² Lagarde, Y.³

10
- 0001082443
- (1988) J. Appl. Phys. , vol.63 , pp. 4744
- Fountain, G.G.¹ Rudder, R.A.² Hattangady, S.V.³ Markunas, R.J.⁴

11
- 0002695133
- (1992) Mater. Res. Soc. Symp. Proc. , vol.254 , pp. 201
- Tamura, M.¹ Oaki, S.²

12
- 0007601210
- (1961) Br. J. Appl. Phys. , vol.12 , pp. 92
- Irving, B.A.¹

13
- 0007647126
- ed. A. M. Glavert (Amsterdam: Elsevier)
- (1985) Thin Foil Preparation for Electron Microscopy , pp. 64
- Goodlhew, P.J.¹

14
- 0001502141
- (1969) Bull. Chem. Soc. Japan , vol.42 , pp. 2247
- Yamaguchi, G.¹ Yanagida, H.² Ono, S.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.