SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 398-399, Issue , 2001, Pages 116-123

Influence of chemical sputtering on the composition and bonding structure of carbon nitride films

(2) Hammer, P a Alvarez, F a

a UNIVERSITY OF CAMPINAS (Brazil)

Author keywords

Carbon nitride; Electronic structure; Ion beam assisted deposition; X Ray photoelectron spectroscopy

Indexed keywords

CURRENT DENSITY; ELECTRONIC STRUCTURE; FILM GROWTH; ION BEAM ASSISTED DEPOSITION; IRRADIATION; MICROSTRUCTURE; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL SPUTTERING;

CARBON NITRIDE;

EID: 17444435712 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01456-0 Document Type: Conference Paper

Times cited : (48)

References (27)

1
- 0029809623
- (1996) J. Tribology , vol.118 , pp. 543
- Cutiongco, E.C.¹ Ly, D.² Chung, Y.-W.³ Bhattia, C.S.⁴

2
- 0030563588
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 611
- Amaratunga, G.A.J.¹ Silva, S.R.P.²

3
- 0034272617
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2277
- Hammer, P.¹ Victoria, N.M.² Alvarez, F.³

4
- 0342945364
- (1995) Phys. Rev. B , vol.75 , pp. 1336
- Sjöström, H.¹ Stafström, S.² Boman, M.³ Sundgren, J.E.⁴

5
- 20444373328
- (1989) Science , vol.245 , pp. 841
- Liu, A.¹ Cohen, L.²

6
- 0034276292
- (2000) J. Vac. Sci. Technol., A , vol.18 , pp. 2349
- Hellgren, N.¹ Johansson, M.P.² Hjörvarsson, B.³ Broitman, E.⁴ Östblom, M.⁵ Hultman, L.⁶ Sundgren, J.E.⁷

7
- 0000616477
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2645
- Franceschini, D.F.¹ Freire L.F., Jr.² Silva, S.R.P.³

8
- 0000360882
- (1995) Int. J. Mod. Phys. B , vol.9 , pp. 3527
- Marton, D.¹ Boyd, K.J.² Rabalais, J.W.³

9
- 0030415484
- (1996) Thin Solid Films , vol.290-291 , pp. 107
- Hammer, P.¹ Baker, M.A.² Lenardi, C.³ Gissler, W.⁴

10
- 0001245503
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1152
- Hammer, P.¹ Gissler, W.²

11
- 0032399431
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 2941
- Hammer, P.¹ Victoria, N.M.² Alvarez, F.³

12
- 4243856801
- (1998) Phys. Rev. B , vol.5 , pp. 2436
- Souto, S.¹ Pickholz, M.² Dos Santos, M.C.³ Alvarez, F.⁴

13
- 0343215213
- (1999) Phys. Rev. B , vol.59 , pp. 5162
- Hellgren, N.¹ Johansson, M.P.² Broitman, E.³ Hultman, L.⁴ Sundgren, J.E.⁵

14
- 0000425478
- (1998) Phys. Rev. B , vol.58 , pp. 2207
- Ronning, C.¹ Feldermann, H.² Merk, R.³ Hofsäss, H.⁴ Reinke, P.⁵ Thiele, J.U.⁶

15
- 0031212446
- (1997) Surf. Interface Anal. , vol.25 , pp. 629
- Baker, M.A.¹ Hammer, P.²

16
- 0000966540
- (1999) J. Chem. Phys. , vol.111 , pp. 3203
- Johanson, Å.¹ Stafström, S.²

17
- 0000328785
- (1999) J. Chem. Phys. , vol.111 , pp. 9678
- Snis, A.¹ Matar, S.F.² Plashkevych, O.³ Ågren, H.⁴

18
- 0006740937
- (1995) Carbon , vol.1641 , pp. 33
- Pels, J.R.¹ Kapteijn, F.² Moulijn, A.J.³ Zhu, Q.⁴ Thomas, K.M.⁵

19
- 0001060792
- (1999) Phys. Rev. B , vol.60
- Ripalda, J.M.¹ Román, E.² Días, N.³ Galán, L.⁴ Montero, I.⁵ Comelli, G.⁶ Baraldi, A.⁷ Lizzit, S.⁸ Goldoni, A.⁹ Paolucci, G.¹⁰

20
- 21544470322
- (1994) J. Appl. Phys. , vol.76 , pp. 3791
- Ogata, K.¹ Chubaci, J.F.D.² Fujimoto, F.³

21
- 0032181662
- (1998) Appl. Surf. Sci. , vol.163 , pp. 105
- Mérel, P.¹ Tabal, M.² Chaker, M.³ Moisa, S.⁴ Margot, J.⁵

22
- 0000629854
- (1998) Appl. Phys. Lett. , vol.73 , pp. 3521
- Alvarez, F.¹ Dos Santos, M.C.² Hammer, P.³

23
- 0034833149
- (2001) Thin Solid Films , vol.382 , pp. 146
- Hellgren, N.¹ Johansson, M.P.² Broitman, E.³ Sandström, P.⁴ Hultman, L.⁵ Sundgren, J.-E.⁶

24
- 0006689365
- aceito
- (2001) J. Appl. Phys.
- Hammer, P.¹ Valente, G.M.S.² Lacerda, R.G.³ Droppa R., Jr.⁴ Zanatta, A.R.⁵ Dos Santos, M.C.⁶ Alvarez, F.⁷

25
- 0000658554
- (1971) Phys. Scr. , vol.3 , pp. 237
- Gelius, U.¹ Allan, C.J.² Johanson, G.³ Siegbahn, H.⁴ Allison, D.A.⁵ Siegbahn, K.⁶

26
- 0032607450
- (1999) Appl. Phys. Lett. , vol.74 , pp. 3290
- Holloway, B.C.¹ Kraft, O.² Shuh, D.K.³ Kelly, M.A.⁴ Dix, W.D.⁵ Pianetta, P.⁶ Hagström, S.⁷

27
- 0003855158
- Almquist and Wiksells Boktryckeri AB, Uppsala
- (1967) ESCA: Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy , vol.20
- Siegbahn, K.¹ Nordling, C.² Fahlman, A.³ Nordberg, R.⁴ Hamrin, K.⁵ Hedman, J.⁶ Johansson, G.⁷ Bergmark, T.⁸ Karlson, S.-E.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.