메뉴 건너뛰기




Volumn 59, Issue 4, 2008, Pages 359-364

Nanoindentation 'pop-in' phenomenon in epitaxial ZnO thin films on sapphire substrates

Author keywords

'Pop in'; Bulk ZnO; Deformation; Nanoindentation; ZnO thin film

Indexed keywords

EPITAXIAL FILMS; MAGNETRON SPUTTERING; PLASTIC DEFORMATION; SAPPHIRE; ZINC OXIDE;

EID: 38949192195     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2007.01.020     Document Type: Article
Times cited : (26)

References (34)
  • 1
    • 0030913555 scopus 로고    scopus 로고
    • Will UV lasers beat the blues?
    • Service R.F. Will UV lasers beat the blues?. Science 276 (1997) 895
    • (1997) Science , vol.276 , pp. 895
    • Service, R.F.1
  • 6
    • 0035484781 scopus 로고    scopus 로고
    • Nanoindentation analysis of Al:ZnO epitaxial whiskers
    • Saitoh H., Namioka Y., Sugata H., and Ohshio S. Nanoindentation analysis of Al:ZnO epitaxial whiskers. Jpn J Appl Phys 40 (2001) 6024-6028
    • (2001) Jpn J Appl Phys , vol.40 , pp. 6024-6028
    • Saitoh, H.1    Namioka, Y.2    Sugata, H.3    Ohshio, S.4
  • 7
  • 8
    • 0026875935 scopus 로고
    • An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
    • Oliver W.C., and Pharr G.M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J Mater Res 7 (1992) 1564-1583
    • (1992) J Mater Res , vol.7 , pp. 1564-1583
    • Oliver, W.C.1    Pharr, G.M.2
  • 9
    • 0000849964 scopus 로고    scopus 로고
    • Discrete and continuous deformation during nanoindentation of thin films
    • Goldstone A., Koh H.J., Zeng K.Y., Giannakopoulos A.E., and Suresh S. Discrete and continuous deformation during nanoindentation of thin films. Acta Mater 48 (2000) 2277-2295
    • (2000) Acta Mater , vol.48 , pp. 2277-2295
    • Goldstone, A.1    Koh, H.J.2    Zeng, K.Y.3    Giannakopoulos, A.E.4    Suresh, S.5
  • 10
    • 0000832504 scopus 로고    scopus 로고
    • Anomalous plastic deformation at surfaces: nanoindentation of gold single crystals
    • Corcoran S.G., Colton R.J., Lilleodden E.T., and Gerberich W.W. Anomalous plastic deformation at surfaces: nanoindentation of gold single crystals. Phys Rev B 55 (1997) R16057-R16060
    • (1997) Phys Rev B , vol.55
    • Corcoran, S.G.1    Colton, R.J.2    Lilleodden, E.T.3    Gerberich, W.W.4
  • 11
    • 0001035841 scopus 로고    scopus 로고
    • Yield strength predictions from the plastic zone around nanocontacts
    • Kramer D.E., Huang H., Kriese M., Robach J., Nelson J., Wright A., et al. Yield strength predictions from the plastic zone around nanocontacts. Acta Mater 47 (1998) 333-343
    • (1998) Acta Mater , vol.47 , pp. 333-343
    • Kramer, D.E.1    Huang, H.2    Kriese, M.3    Robach, J.4    Nelson, J.5    Wright, A.6
  • 12
    • 0032084105 scopus 로고    scopus 로고
    • Non-linear deformation mechanisms during nanoindentation
    • Bahr D.F., Kramer D.E., and Gerberich W.W. Non-linear deformation mechanisms during nanoindentation. Acta Mater 46 (1998) 3605-3617
    • (1998) Acta Mater , vol.46 , pp. 3605-3617
    • Bahr, D.F.1    Kramer, D.E.2    Gerberich, W.W.3
  • 13
    • 0032484318 scopus 로고    scopus 로고
    • Dislocation nucleation at nano-scale mechanical contacts
    • Michalke T.A., and Houston J.E. Dislocation nucleation at nano-scale mechanical contacts. Acta Mater 46 (1998) 391-396
    • (1998) Acta Mater , vol.46 , pp. 391-396
    • Michalke, T.A.1    Houston, J.E.2
  • 14
    • 0026818633 scopus 로고
    • The deformation behavior of ceramic crystals subjected to very low load (nano)indentations
    • Page T.F., Oliver W.C., and McHargue C.J. The deformation behavior of ceramic crystals subjected to very low load (nano)indentations. J Mater Res 7 (1992) 450-473
    • (1992) J Mater Res , vol.7 , pp. 450-473
    • Page, T.F.1    Oliver, W.C.2    McHargue, C.J.3
  • 15
    • 18744422474 scopus 로고    scopus 로고
    • Nanoindentation pop-in effect in semiconductors
    • Leipner H.S., Lorenz D., Zecker A., Lei H., and Grau P. Nanoindentation pop-in effect in semiconductors. Physica B 308-310 (2001) 446-449
    • (2001) Physica B , vol.308-310 , pp. 446-449
    • Leipner, H.S.1    Lorenz, D.2    Zecker, A.3    Lei, H.4    Grau, P.5
  • 16
    • 33751003499 scopus 로고    scopus 로고
    • Micro/nanomechanical properties of aluminium-doped zinc oxide films prepared by radio frequency magnetron sputtering
    • Lin L.Y., Jeong M.C., Kim D.E., and Myoung J.M. Micro/nanomechanical properties of aluminium-doped zinc oxide films prepared by radio frequency magnetron sputtering. Surf Coat Technol 201 (2006) 2547-2552
    • (2006) Surf Coat Technol , vol.201 , pp. 2547-2552
    • Lin, L.Y.1    Jeong, M.C.2    Kim, D.E.3    Myoung, J.M.4
  • 17
    • 31144450740 scopus 로고    scopus 로고
    • Nanomechanical characterizations of InGaN thin films
    • Jian S.R., Fang T.H., and Chuu D.S. Nanomechanical characterizations of InGaN thin films. Appl Surf Sci 252 (2006) 3033-3042
    • (2006) Appl Surf Sci , vol.252 , pp. 3033-3042
    • Jian, S.R.1    Fang, T.H.2    Chuu, D.S.3
  • 18
    • 31944438762 scopus 로고    scopus 로고
    • Quantitative analysis of dislocation pile-ups nucleated during nanoindentation in MgO
    • Gaillard Y., Tromas C., and Woirgard J. Quantitative analysis of dislocation pile-ups nucleated during nanoindentation in MgO. Acta Mater 54 (2006) 1409-1417
    • (2006) Acta Mater , vol.54 , pp. 1409-1417
    • Gaillard, Y.1    Tromas, C.2    Woirgard, J.3
  • 19
    • 33646042884 scopus 로고    scopus 로고
    • Nanoindentation studies of materials
    • Schuh C.A. Nanoindentation studies of materials. Mater Today 9 (2006) 32-40
    • (2006) Mater Today , vol.9 , pp. 32-40
    • Schuh, C.A.1
  • 20
    • 33645034736 scopus 로고    scopus 로고
    • Visualizing dislocation nucleation by indenting colloidal crystals
    • Schall P., Cohen I., Weitz D.A., and Spaepen F. Visualizing dislocation nucleation by indenting colloidal crystals. Nat Lett 440 (2006) 319-323
    • (2006) Nat Lett , vol.440 , pp. 319-323
    • Schall, P.1    Cohen, I.2    Weitz, D.A.3    Spaepen, F.4
  • 21
    • 27144454510 scopus 로고    scopus 로고
    • Influence of indenter tip geometry on elastic deformation during nanoindentation
    • Bei H., George E.P., Hay J.L., and Pharr G.M. Influence of indenter tip geometry on elastic deformation during nanoindentation. Phys Rev Lett 95 (2005) 04550-1-4
    • (2005) Phys Rev Lett , vol.95
    • Bei, H.1    George, E.P.2    Hay, J.L.3    Pharr, G.M.4
  • 23
    • 4444317159 scopus 로고    scopus 로고
    • Pop-in events induced by spherical indentation in compound semiconductors
    • Bradby J.E., Williams J.S., and Swain M.V. Pop-in events induced by spherical indentation in compound semiconductors. J Mater Res 19 (2004) 380-386
    • (2004) J Mater Res , vol.19 , pp. 380-386
    • Bradby, J.E.1    Williams, J.S.2    Swain, M.V.3
  • 24
    • 0034318657 scopus 로고    scopus 로고
    • Photoluminescence and heteroepitaxy of ZnO on sapphire substrate (0001) grown by rf magnetron sputtering
    • Kim K.K., Song J.H., Jung H.J., Choi W.K., Park S.J., Song J.H., et al. Photoluminescence and heteroepitaxy of ZnO on sapphire substrate (0001) grown by rf magnetron sputtering. J Vac Sci Technol A Vac Surf Films 18 (2000) 2864-2868
    • (2000) J Vac Sci Technol A Vac Surf Films , vol.18 , pp. 2864-2868
    • Kim, K.K.1    Song, J.H.2    Jung, H.J.3    Choi, W.K.4    Park, S.J.5    Song, J.H.6
  • 28
    • 33747873429 scopus 로고    scopus 로고
    • Pop-in phenomenon during nanoindentation in epitaxial GaN thin films on c-plane sapphire substrates
    • Navamathavan R., Moon Y.T., Kim G.S., Lee T.G., Hahn J.H., and Park S.J. Pop-in phenomenon during nanoindentation in epitaxial GaN thin films on c-plane sapphire substrates. Mater Chem Phys 99 (2006) 410-413
    • (2006) Mater Chem Phys , vol.99 , pp. 410-413
    • Navamathavan, R.1    Moon, Y.T.2    Kim, G.S.3    Lee, T.G.4    Hahn, J.H.5    Park, S.J.6
  • 30
    • 0035443911 scopus 로고    scopus 로고
    • Transmission electron microscopy of threading dislocations in ZnO films grown on sapphire
    • Lim S.H., Washburn J., and Weber Z.L. Transmission electron microscopy of threading dislocations in ZnO films grown on sapphire. J Vac Sci Technol A Vac Surf Films 19 (2001) 2601-2603
    • (2001) J Vac Sci Technol A Vac Surf Films , vol.19 , pp. 2601-2603
    • Lim, S.H.1    Washburn, J.2    Weber, Z.L.3
  • 31
    • 0030108963 scopus 로고    scopus 로고
    • Growth defects in GaN films on sapphire: the probable origin of threading dislocations
    • Ning X.J., Chien F.R., Pirouz P., Yang J.W., and Asif Khan M. Growth defects in GaN films on sapphire: the probable origin of threading dislocations. J Mater Res 11 (1996) 580-592
    • (1996) J Mater Res , vol.11 , pp. 580-592
    • Ning, X.J.1    Chien, F.R.2    Pirouz, P.3    Yang, J.W.4    Asif Khan, M.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.