Investigation of optical properties of a-C:H films deposited from acetylene using direct ion beam deposition method

Vacuum

Volumn 78, Issue 2-4, 2005, Pages 593-597

  Grigonis, A ^a   Rutkuniene, Z ^a   Kopustinskas, V ^b   Babonas, G J ^c   Reza, A ^c  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^c CENTER FOR PHYSICAL SCIENCES AND TECHNOLOGY   (Lithuania)

Author keywords

Amorphous carbon films; Direct ion deposition; Ellipsometry; Raman spectroscopy

Indexed keywords

ACETYLENE; CARBON; CONCENTRATION (PROCESS); DEPOSITION; ELLIPSOMETRY; ION BEAMS; LIGHT SCATTERING; RAMAN SPECTROSCOPY;

AMORPHOUS CARBON FILMS; DIRECT ION DEPOSITION; GAS MIXTURES; HYDROGEN CONCENTRATION;

AMORPHOUS FILMS;

EID: 18444387989     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2005.01.092     Document Type: Conference Paper

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