The role of hydrogen in a-C:H films deposited from hexane or acetylene using direct ion beam deposition method

Vacuum

Volumn 75, Issue 3, 2004, Pages 261-267

  Grigonis, A ^a   Sablinskas, V ^b   Silinskas, M ^c   Tribandis, D ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b VILNIUS UNIVERSITY   (Lithuania)

^c OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Amorphous hydrogenated carbon; Hydrogen; Ion beam deposition; Raman spectroscopy

Indexed keywords

ACETYLENE; GRAPHITE; HYDROGEN; HYDROGENATION; ION BEAM ASSISTED DEPOSITION; MIXTURES; RAMAN SPECTROSCOPY;

AMORPHOUS HYDROGENATED CARBON; BIO-MEDICAL FIELDS;

AMORPHOUS FILMS;

EID: 2942687788     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.03.006     Document Type: Article

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