Chemical sputtering of hydrocarbon films

Journal of Applied Physics

Volumn 94, Issue 4, 2003, Pages 2373-2380

  Hopf, C ^a   Von Keudell, A ^a,b   Jacob, W ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; PARTICLE BEAM DYNAMICS; SPUTTERING; THIN FILMS;

CHEMICAL SPUTTERING;

HYDROCARBONS;

EID: 0041323098     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1594273     Document Type: Article

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