Comparative studies of the feed gas composition effects on the characteristics of DLC films deposited by magnetron sputtering

Thin Solid Films

Volumn 459, Issue 1-2, 2004, Pages 282-285

  Libardi, J ^a   Grigorov, K ^b   Massi, M ^c   Otani, C ^c   Ravagnani, S P ^a   Maciel, H S ^c   Guerino, M ^c   Ocampo, J M J ^d  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b INSTITUTE OF ELECTRONICS   (Bulgaria)

^c INSTITUTO DE ESTUDOS AVANÇADOS   (Brazil)

^d EAFIT ^*  (Colombia)

Author keywords

Acetylene; Diamond like carbon; Hardness; Methane; Roughness

Indexed keywords

ACETYLENE; ARGON; ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; INDENTATION; MAGNETRON SPUTTERING; METHANE; MICROELECTROMECHANICAL DEVICES; PROFILOMETRY; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION;

GAS DISCHARGE; SILICON SUBSTRATES;

DIAMOND LIKE CARBON FILMS;

EID: 2942534389     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.131     Document Type: Conference Paper

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