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Thin Solid Films

Volumn 406, Issue 1-2, 2002, Pages 275-281

Investigation of diamond-like carbon films synthesized by multi-jet hollow cathode rf plasma source

(5) Fedosenko, G a Korzec, D a Engemann, J a Lyebyedyev, D a Scheer, H C a

a UNIVERSITY OF WUPPERTAL (Germany)

Author keywords

Chemical vapor deposition; Ellipsometry; Optical properties; Raman scattering

Indexed keywords

ALGORITHMS; CATHODES; ELLIPSOMETRY; ENERGY GAP; FILM PREPARATION; HELIUM; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; REGRESSION ANALYSIS; SUBSTRATES; SYNTHESIS (CHEMICAL); VICKERS HARDNESS TESTING;

HOLLOW CATHODE DISCHARGES (HCD);

DIAMOND LIKE CARBON FILMS;

EID: 0037051232 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01768-0 Document Type: Article

Times cited : (19)

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