Feedforward correction of nonlinearities in piezoelectric scanner constructions and its experimental verification

Review of Scientific Instruments

Volumn 78, Issue 5, 2007, Pages

  Graffel, B ^a   Muller F ^b   Muller A D ^b   Hietschold, M ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b Anfatec Instruments AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FORWARD ERROR CORRECTION; HYSTERESIS; NONLINEAR OPTICS; OPTICAL SENSORS; SCANNING;

FEEDFORWARD CORRECTION; INTEGRAL NONLINEARITIES; STRAIN GAUGE SENSOR SYSTEMS;

PIEZOELECTRIC ACTUATORS;

ALGORITHM; ARTICLE; ARTIFACT; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; FEEDBACK SYSTEM; INSTRUMENTATION; LABORATORY DIAGNOSIS; METHODOLOGY; MOTION; NONLINEAR SYSTEM; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; TRANSDUCER;

ALGORITHMS; ARTIFACTS; ELECTRONICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; FEEDBACK; MOTION; NONLINEAR DYNAMICS; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SPECIMEN HANDLING; TRANSDUCERS;

EID: 34249950557     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2736786     Document Type: Article

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