Large-area uniform hydrogen-free diamond-like carbon films prepared by unbalanced magnetron sputtering for infrared anti-reflection coatings

Diamond and Related Materials

Volumn 17, Issue 2, 2008, Pages 194-198

  Xu, Junqi ^a   Fan, Huiqing ^a   Liu, Weiguo ^b   Hang, Lingxia ^b  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b XI'AN TECHNOLOGICAL UNIVERSITY   (China)

Author keywords

Diamond like carbon films; Physical vapor deposition (PVD); Thickness uniformity; Unbalanced magnetron sputtering (UBMS)

Indexed keywords

HYDROGEN; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; PROTECTIVE COATINGS;

MAGNETRON FIELD DISTRIBUTION; THICKNESS UNIFORMITY; UNBALANCED MAGNETRON SPUTTERING (UBMS); UNIFORM FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 38149062748     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.12.010     Document Type: Article

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