Studies on the optimisation of unbalanced magnetron sputtering cathodes

Vacuum

Volumn 52, Issue 3, 1999, Pages 307-311

  Komath, Manoj ^a   Mohan Rao, G ^a   Mohan, S ^b  

^a INDIAN INSTITUTE OF SCIENCE   (India)

^b CSIR CENTRAL SCIENTIFIC INSTRUMENTS ORGANISATION   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC COILS; ELECTRIC CURRENTS; ELECTROMAGNETS; GLOW DISCHARGES; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; PERMANENT MAGNETS;

UNBALANCED MAGNETRON SPUTTERING CATHODES;

CATHODES;

EID: 0033097265     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00304-2     Document Type: Article

References (12)

1. Rohde SL. In: Francombe MH, Vossen JL, editors. Physics of thin films New York: Academic Press. 1994;18.
2. Window B. Surf Coat Technol 1995;71:93.
3. Mohan Rao G, Mohan S. Ionics 1995;12:53.
4. Sproul WD. Surf Coat Technol 1991;49:284.
5. Window B, Savvides N. J Vac Sci Technol 1986;A4:196.
6. Kadlec S, Musil J. J Vac Sci Technol 1995;A13:389.
7. Muralidhar GK, Musil J, Kadlec S. Rev Sci Instr 1995;66:4961.
8. Perlov CM, Brauer JR. IEEE Trans Magn 1986;MAG-22:831.
9. Wong MS, Sproul WD, Rohde SL. Surf Coat Technol 1991; 49:121.
10. Murphy MJ, Cameron DC, Karim MZ, Hashmi MSJ. Surf Coat Technol 1993;57:1.
11. Musil J, Kadlec S, Munz WD. J Vac Sci Technol 1991;A9:1171.
12. Schiller S, Heisig U, Goedicke K. Thin Solid Films 1977;40:327.