Versatile microwave PECVD technique for deposition of DLC and other ordered carbon nanostructures

Vacuum

Volumn 63, Issue 3, 2001, Pages 433-439

  Kumar, Sudheer ^a   Rauthan, C M S ^a   Dixit, P N ^a   Srivatsa, K M K ^a   Khan, M Y ^b   Bhattacharyya, R ^a  

^a NATIONAL PHYSICAL LABORATORY   (India)

^b JAMIA MILLIA ISLAMIA CENTRAL UNIVERSITY   (India)

Author keywords

Atomic force microscopy (AFM); Carbon nanotubes (CNTs); Diamond like carbon (DLC); MW PECVD

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; DIAMOND LIKE CARBON FILMS; GRAIN SIZE AND SHAPE; HARDNESS; MICROWAVES; RAMAN SPECTROSCOPY; STRESSES; SURFACE ROUGHNESS; SYNTHETIC DIAMONDS; TRANSPARENCY;

MULTIWALLED CARBON NANOTUBES; NANODIAMONDS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0035797617     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00362-1     Document Type: Article

References (21)