Properties of diamond-like carbon films prepared by unbalanced magnetron sputtering

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 25, Issue 2, 2005, Pages

  Xu, Junqi ^a   Hang, Lingxia ^a   Hui, Yingxue ^a  

^a XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Diamond like carbon film; Magnetron sputtering; Properties; Unbalanced magnetron sputtering

Indexed keywords

CORROSION RESISTANCE; FRICTION; HARDNESS; MAGNETRON SPUTTERING; PHYSICAL PROPERTIES; STABILITY; WEAR RESISTANCE;

CHEMICAL STABILITY; FRICTION COEFFICIENT; ION ASSISTED DEPOSITION; UNBALANCED MAGNETRON SPUTTERING;

DIAMOND LIKE CARBON FILMS;

EID: 20444418637     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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