Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering

Thin Solid Films

Volumn 373, Issue 1-2, 2000, Pages 247-250

  Sanchez N A ^a,b   Rincon C ^a   Zambrano, G ^b   Galindo, H ^c   Prieto, P ^b  

^a Universidad Autonoma de Occidente   (Colombia)

^b UNIVERSIDAD DEL VALLE   (Colombia)

^c UNIVERSIDAD DE LOS ANDES   (Venezuela)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; EMISSION SPECTROSCOPY; LIGHT ABSORPTION; MAGNETRON SPUTTERING; MORPHOLOGY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; STAINLESS STEEL; SUBSTRATES; THIN FILMS;

TRANSMISSION INFRARED SPECTROSCOPY ANALYSIS;

DIAMOND FILMS;

EID: 0342973130     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01090-7     Document Type: Article

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