Optimisation of diamond-like carbon films by unbalanced magnetron sputtering for infrared transmission enhancement

Thin Solid Films

Volumn 515, Issue 1, 2006, Pages 357-361

  Hang, Lingxia ^a,b   Yin, Y ^a   Xu, Junqi ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b XI'AN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Diamond like carbon films (DLC); Infrared anti reflection; Unbalanced magnetron sputtering (UBMS)

Indexed keywords

INFRARED ANTI-REFLECTION; TRANSMITTANCE; UNBALANCED MAGNETRON SPUTTERING (UBMS); WETTING ANGLE;

INFRARED RADIATION; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; SURFACE ROUGHNESS; THICK FILMS;

DIAMOND LIKE CARBON FILMS;

EID: 33750027015     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.099     Document Type: Article

References (19)

1. Zhang G.F., and Zheng X. Surf. Coat. Technol. 82 (1996) 110
2. Macleon H.A. Thin-film Optical Filters. 3rd edition (2001), Institute of Physics Publishing, Bristol
3. McKenzie D.R., Yin Y., Marks N.A., et al. J. Non-Cryst. Solids 164-166 (1993) 1101
4. Basu M., Dutta J., Chaudhuri S., et al. Vacuum 47 (1996) 233
5. Puchert M.K., Timbrell P.Y., and Lamb R.N. J. Vac. Sci. Technol., A 12 (1994) 727
6. McKenzie D.R., Yin Y., Marks N.A., Davis C.A., Pailthorpe B.A., Amaratumga G.A.J., and Veerasamy V.S. Diamond Relat. Mater. 3 (1994) 353
7. Ferrari C., Rodil S.E., Robertson J., and Milne W.I. Diamond Relat. Mater. 11 (2002) 994
8. Spanepen F. Acta Mater. 48 (2000) 21
9. Yin Y., McKenzie R., Zhou J., and Das A. J. Appl. Phys. 79 (1996) 1563
10. Window B., and Savvides N. Vac. Sci. Technol., A 4 (1986) 196
11. Musil J. Surf. Coat. Technol. 100 (1998) 280
12. Musil J., Kadlec S., Valvoda V., Kuel Jr. R., and Èerný R. Surf. Coat. Technol. 43-44 (1990) 259
13. Stoney G. Proc. R. Soc. Lond. A82 (1909) 172
14. Xu J., Hang L., and Cai C. Vac. Sci. Technol. (China) 24 (2004) 72
15. Xu J., Hang L., and Xi Y. Vac. Sci. Technol. (China) 25 (2005) 134
16. Delplancke-Ogletree M., and Monteiro O. Diamond Relat. Mater. 12 (2003) 2119
17. Davis C.A. Thin Solid Films 226 (1993) 30
18. Yin Y., and McKenzie D.R. Thin Solid Films 280 (1996) 90
19. Yin Y., McKenzie D., and Bilek M. Surf. Coat. Technol. 198 (2005) 156