Quartz-crystal-microbalance study for dissolution of resist polymers

Journal of Photopolymer Science and Technology

Volumn 20, Issue 4, 2007, Pages 585-590

  Toriumi, Minoru ^a  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Characteristic matrix method; Development; QCM; Swelling

Indexed keywords

EID: 37549001667     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.20.585     Document Type: Article

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