CMOS integrated cantilevers with sub-νm tips for surface temperature measurement

Journal of Micromechanics and Microengineering

Volumn 17, Issue 12, 2007, Pages 2432-2438

  Wu, Chi Pei ^a   Yang, Sidney S ^a   Hung, Shi Jie ^a   Tu, Cheng Ting ^a   Lu, Michael S C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CMOS INTEGRATED CIRCUITS; POLYSILICON; TEMPERATURE MEASUREMENT;

ELECTROTHERMAL ACTUATION; SURFACE TEMPERATURE MEASUREMENT;

CANTILEVER BEAMS;

EID: 36949006714     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/12/007     Document Type: Article

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