Micro cantilever probe array with integration of electro-thermal nano tip and piezoresistive sensor

Proceedings of IEEE Sensors

Volumn 2, Issue 2, 2003, Pages 830-833

  Yang, Zunxian ^a   Li, Xinxin ^a   Wang, Yuelin ^a   Liu, Min ^a   Bao, Haifei ^a   Cheng, Baoluo ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Cantilever tip probe; Electro thermal nano tip; Nanoelectromechanical technology; Piezoresistive sensitivity

Indexed keywords

COMPUTER SIMULATION; COOLING; FINITE ELEMENT METHOD; HEATING; MICROMACHINING; NANOTECHNOLOGY; OPTIMIZATION; POLYNOMIALS; SENSITIVITY ANALYSIS; SENSORS; SILICON;

CANTILEVER-TIP PROBES; ELECTRO-THERMAL NANO-TIPS; NANOELECTROMECHANICAL TECHNOLOGY; PIEZORESISTIVE SENSITIVITY;

DATA STORAGE EQUIPMENT;

EID: 1542303621     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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