A novel scanning thermal microscopy system

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 627-630

  Tanaka, Kastuhiro ^a   Kuwano, Hiroki ^a   Nagasawa, Sumito ^a   Ono, Takahito ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INFRARED RADIATION; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; PIEZOELECTRIC TRANSDUCERS; PYROELECTRICITY; REACTIVE ION ETCHING; SCANNING; SHIELDING;

HIGH-LATERAL RESOLUTION; INFRARED RAYS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; NANO-METER SCALE; NON-CONTACT TYPE; PYRO-ELECTRIC DETECTORS; SCANNING THERMAL MICROSCOPY; SHIELDING FILM;

COMPOSITE MICROMECHANICS;

EID: 52249092175     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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