Self-organized tantalum oxide nanopyramidal arrays for antireflective structure

Applied Physics Letters

Volumn 90, Issue 17, 2007, Pages

  Wu, Chia Tien ^c   Ko, Fu Hsiang ^a   Lin, Chun Hung ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; OXIDATION; PERIODIC STRUCTURES; REFLECTION; SPECTROSCOPIC ANALYSIS; TANTALUM COMPOUNDS; THIN FILMS;

ANTIREFLECTIVE STRUCTURE; NANOPYRAMIDAL ARRAYS; TANTALUM FILMS; TANTALUM OXIDE;

NANOSTRUCTURED MATERIALS;

EID: 34248572010     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2731659     Document Type: Article

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